Accurate Motion Control

Up to 12 alignment axes and an equal number of auxiliary stages fulfill practically all requirements. The feedback signals for the active alignment are not limited to optical power measurement, but also polarization, beam profile, wavelength and bandwidth. All alignment axes use linear encoders with a resolution of 5 nm – ensuring a reliable result for extremely sensitive process steps.

Benefits of NanoHybrid

  • Perfect active alignment
  • High configuration versatility
  • Extensive library for instrumentation
  • Ideal for development and small serial production
  • Data storage
  • Graphic display

Removable trays position the devices inside the station while the mechanical and electrical interfaces remain unchanged.

NanoHybrid can be equipped with different assembly techniques. Precision dispensers apply smallest volumes of resin, followed by UV or thermal curing. Multiple weld heads introduce the laser energy symmetrically in order to reduce the shift during laser welding procedures. Alternatively, selective laser soldering can be chosen.

A central rotation axis with a chuck for wafers and single chips enhances the capabilities of NanoHybrid with opto-electronic testing for VCSEL, Silicon Photonics chips and other devices such as modulators.

Process Software

The software package TestMaster executes the alignments tasks. It also defines the process flow, initiates the instruments for assembly and collects all data and parameters. The powerful machine vision supports the active alignment and ensures quality control. If NanoHybrid is used for process development, the programmed sequences can be easily transferred into production.

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nanosystec GmbH

Marie-Curie-Strasse 6
64823 Groß-Umstadt

Telefon: +49 6078 78254 0
Telefax: +49 6078 78254-10
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